Invention Grant
- Patent Title: Dynamically adjustable focal spot
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Application No.: US15544177Application Date: 2015-12-18
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Publication No.: US10535491B2Publication Date: 2020-01-14
- Inventor: Martin Rommel , Louis P. Wainwright
- Applicant: American Science and Engineering, Inc.
- Applicant Address: US MA Billerica
- Assignee: American Science and Engineering, Inc.
- Current Assignee: American Science and Engineering, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Novel IP
- International Application: PCT/US2015/066603 WO 20151218
- International Announcement: WO2016/118271 WO 20160728
- Main IPC: H01L35/30
- IPC: H01L35/30 ; H01J35/14 ; G21K1/02 ; H01J35/30

Abstract:
Methods for maintaining a specified beam profile of an x-ray beam extracted from an x-ray target over a large range of extraction angles relative to the target. A beam of electrons is generated and directed toward a target at an angle of incidence with respect to the target, with the beam of electrons forming a focal spot corresponding to the cross-section of the electron beam. At least one of a size, shape, and orientation of the electron beam cross-section is dynamically varied as the extraction angle is varied, and the extracted x-ray beam is collimated. Dynamically varying the size, shape or orientation of the electron beam cross-section may be performed using focusing and stigmator coils.
Public/Granted literature
- US20180012724A1 Dynamically Adjustable Focal Spot Public/Granted day:2018-01-11
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