Invention Grant
- Patent Title: Substrate-treating apparatus and method for treating a substrate using the same
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Application No.: US14809028Application Date: 2015-07-24
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Publication No.: US10535510B2Publication Date: 2020-01-14
- Inventor: Bong-Kyun Kim , Young-Min Moon , Soo-Min An
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2014-0134570 20141006
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A substrate-treating apparatus includes a liquid-providing part, a first liquid-removing knife and a returning part. The liquid-providing part provides a first liquid chemical for cleaning a substrate that includes a metal pattern and a photoresist pattern on the metal pattern, and for removing an etchant that remains on the substrate. The first liquid-removing knife sprays a second liquid chemical in a direction inclined and opposite to a returning direction of the substrate, so as to remove the first liquid chemical, the first liquid chemical including a metal precipitate. The returning part returns the substrate from the liquid-providing part toward the first liquid-removing knife in the returning direction.
Public/Granted literature
- US20160096201A1 SUBSTRATE-TREATING APPARATUS AND METHOD FOR TREATING A SUBSTRATE USING THE SAME Public/Granted day:2016-04-07
Information query
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