Invention Grant
- Patent Title: Method of producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip
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Application No.: US15527402Application Date: 2015-11-11
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Publication No.: US10535515B2Publication Date: 2020-01-14
- Inventor: Joachim Hertkorn
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensburg
- Agency: DLA Piper LLP (US)
- Priority: DE102014116999 20141120
- International Application: PCT/EP2015/076340 WO 20151111
- International Announcement: WO2016/078986 WO 20160526
- Main IPC: H01L29/18
- IPC: H01L29/18 ; H01L21/02 ; H01L33/06 ; H01L33/46 ; H01L23/00

Abstract:
A method of producing an optoelectronic semiconductor chip includes in order: A) creating a nucleation layer on a growth substrate, B) applying a mask layer on to the nucleation layer, C) growing a coalescence layer, wherein the coalescence layer is grown starting from regions of the nucleation layer not covered by mask islands having a first main growth direction perpendicular to the nucleation layer so that ribs are formed, D) further growing the coalescence layer with a second main growth direction parallel to the nucleation layer to form a contiguous and continuous layer, E) growing a multiple quantum well structure on the coalescence layer, F) applying a mirror having metallic contact regions that impress current into the multiple quantum well structure and mirror islands for the total reflection of radiation generated in the multiple quantum well structure, and G) detaching the growth substrate and creating a roughening by etching.
Public/Granted literature
- US20170352535A1 METHOD OF PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR CHIP AND OPTOELECTRONIC SEMICONDUCTOR CHIP Public/Granted day:2017-12-07
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