Invention Grant
- Patent Title: Substrate storing container
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Application No.: US15508354Application Date: 2015-02-27
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Publication No.: US10535540B2Publication Date: 2020-01-14
- Inventor: Yuta Kanamori , Chiaki Matsutori , Minoru Tomita , Kazunori Ozawa
- Applicant: MIRAIAL Co., Ltd
- Applicant Address: JP Tokyo
- Assignee: MIRAIAL CO., LTD.
- Current Assignee: MIRAIAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: WOPCT/JP2014/075734 20140926
- International Application: PCT/JP2015/055817 WO 20150227
- International Announcement: WO2016/047163 WO 20160331
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/673
Abstract:
A substrate storing container includes a container main body, a lid body, and a lateral substrate support portion. The lateral substrate support portion of the substrate storing container includes substrate contact portions touching a substrate when supporting an edge portion of the substrate, and contact portion support portions supporting the substrate contact portions. The substrate contact portions are made of a material having a heat-resisting property with respect to temperature of the substrate touching the substrate contact portions. The contact portion support portions are made of a material having a lower heat-resisting property than that of the substrate contact portions and having a lower coefficient of moisture absorption than that of the substrate contact portions.
Public/Granted literature
- US20170287758A1 SUBSTRATE STORING CONTAINER Public/Granted day:2017-10-05
Information query
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