Invention Grant
- Patent Title: Field-effect transistor, method of manufacturing the same, and radio-frequency device
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Application No.: US16050815Application Date: 2018-07-31
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Publication No.: US10535607B2Publication Date: 2020-01-14
- Inventor: Naoki Saka , Daisaku Okamoto , Hideki Tanaka
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2014-086805 20140418
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L23/482 ; H01L23/522 ; H01L23/532 ; H01L23/528 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/78

Abstract:
There is provided a field-effect transistor including: a gate electrode; a semiconductor layer having a source region and a drain region with the gate electrode in between; contact plugs provided on the source region and the drain region; first metals stacked on the contact plugs; and a low-dielectric constant region provided in a region between the first metals along an in-plane direction of the semiconductor layer and provided at least in a first region below bottom surfaces of the first metals along a stacking direction.
Public/Granted literature
- US20180350744A1 FIELD-EFFECT TRANSISTOR, METHOD OF MANUFACTURING THE SAME, AND RADIO-FREQUENCY DEVICE Public/Granted day:2018-12-06
Information query
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