Invention Grant
- Patent Title: Structure and method for 3D Image sensor
-
Application No.: US15803913Application Date: 2017-11-06
-
Publication No.: US10535697B2Publication Date: 2020-01-14
- Inventor: Min-Feng Kao , Dun-Nian Yaung , Jen-Cheng Liu , Chun-Chieh Chuang , Feng-Chi Hung , Shuang-Ji Tsai , Jen-Shyan Lin , Shu-Ting Tsai , Wen-I Hsu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146 ; H01L31/02

Abstract:
An image sensor structure that includes a first semiconductor substrate having a plurality of imaging sensors; a first interconnect structure formed on the first semiconductor substrate; a second semiconductor substrate having a logic circuit; a second interconnect structure formed on the second semiconductor substrate, wherein the first and the second semiconductor substrates are bonded together in a configuration that the first and second interconnect structures are sandwiched between the first and second semiconductor substrates; and a backside deep contact (BDCT) feature extended from the first interconnect structure to the second interconnect structure, thereby electrically coupling the logic circuit to the image sensors.
Public/Granted literature
- US20180061880A1 Structure and Method for 3D Image Sensor Public/Granted day:2018-03-01
Information query
IPC分类: