Invention Grant
- Patent Title: Semiconductor structure and manufacturing method of the same
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Application No.: US15879888Application Date: 2018-01-25
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Publication No.: US10535738B2Publication Date: 2020-01-14
- Inventor: Meng-Hsuan Hsiao , Winnie Victoria Wei-Ning Chen , Tung Ying Lee
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L21/332
- IPC: H01L21/332 ; H01L29/10 ; H01L21/8238 ; H01L29/06 ; H01L29/165 ; H01L27/092 ; H01L29/786 ; H01L29/66

Abstract:
Present disclosure provides a semiconductor structure including a first transistor and a second transistor. The first transistor includes a semiconductor substrate having a top surface and a first anti-punch through region doped with a first conductivity dopant at the top surface. The first transistor further includes a first channel over the top surface of the semiconductor substrate by a first distance. The second transistor includes a second anti-punch through region doped with a second conductivity dopant at the top surface of the semiconductor substrate. The second transistor further includes a second channel over the top surface of the semiconductor substrate by a second distance greater than the first distance. Present disclosure also provides a method for manufacturing the semiconductor structure described herein.
Public/Granted literature
- US20190131405A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2019-05-02
Information query
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