- Patent Title: Method of manufacturing a bipolar transistor with trench structure
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Application No.: US16427356Application Date: 2019-05-31
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Publication No.: US10535753B2Publication Date: 2020-01-14
- Inventor: Qiaozhi Zhu , Wei Liu
- Applicant: Shanghai Huali Microelectronics Corporation
- Agency: Kilpatrick Townsend & Stockton, LLP
- Priority: CN201711374117 20171219
- Main IPC: H01L21/8222
- IPC: H01L21/8222 ; H01L29/66 ; H01L21/02 ; H01L29/165 ; H01L29/08 ; H01L29/78

Abstract:
The present disclosure relates to a semiconductor structure and a manufacturing process therefor. Provided is a method for manufacturing a bipolar transistor with a trench structure, including providing a semiconductor substrate; fabricating a shallow trench isolation structure to define a device active area; forming an N-type well and a P-type well in the active area to define a first region, a second region and a third region of the bipolar transistor; etching a portion, adjacent to the shallow trench isolation structure, in the first region to form a trench; performing ion implantation to form an emitter, a base and a collector of the bipolar transistor; forming a salicide block structure in the trench; and forming a metal electrode of the bipolar transistor, wherein the emitter is formed in the first region. The present disclosure further provides a bipolar transistor with a trench structure.
Public/Granted literature
- US20190319115A1 BIPOLAR TRANSISTOR WITH TRENCH STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-10-17
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