Invention Grant
- Patent Title: Techniques for MRAM MTJ top electrode connection
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Application No.: US15809182Application Date: 2017-11-10
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Publication No.: US10535814B2Publication Date: 2020-01-14
- Inventor: Harry-Hak-Lay Chuang , Chern-Yow Hsu , Shih-Chang Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/12

Abstract:
Some embodiments relate to an integrated circuit including a magnetoresistive random-access memory (MRAM) cell. The integrated circuit includes a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a plurality of dielectric layers and a plurality of metal layers that are stacked over one another in alternating fashion. The plurality of metal layers include a lower metal layer and an upper metal layer disposed over the lower metal layer. A bottom electrode is disposed over and in electrical contact with the lower metal layer. A magnetic tunneling junction (MTJ) is disposed over an upper surface of bottom electrode. A top electrode is disposed over an upper surface of the MTJ and is in direct electrical contact with a lower surface of the upper metal layer.
Public/Granted literature
- US20180097176A1 TECHNIQUES FOR MRAM MTJ TOP ELECTRODE CONNECTION Public/Granted day:2018-04-05
Information query
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