Invention Grant
- Patent Title: Yttrium fluoride spray material, yttrium oxyfluoride-deposited article, and making methods
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Application No.: US15331324Application Date: 2016-10-21
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Publication No.: US10538836B2Publication Date: 2020-01-21
- Inventor: Yasushi Takai , Noriaki Hamaya
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2015-208616 20151023
- Main IPC: C09D1/00
- IPC: C09D1/00 ; C23C4/11 ; C23C4/134 ; C09D7/40 ; H01J37/32 ; H01L21/67 ; C08K3/16
Abstract:
An yttrium fluoride spray material contains Y5O4F7 and YF3, and has an average particle size of 10-60 μm and a bulk density of 1.2-2.5 g/cm3. The Y5O4F7 and YF3 in the yttrium fluoride spray material consist of 30 to 90% by weight of Y5O4F7 and the balance of YF3. A sprayed coating of yttrium oxyfluoride is obtained by atmospheric plasma spraying of the spray material.
Public/Granted literature
- US20170114440A1 YTTRIUM FLUORIDE SPRAY MATERIAL, YTTRIUM OXYFLUORIDE-DEPOSITED ARTICLE, AND MAKING METHODS Public/Granted day:2017-04-27
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