Invention Grant
- Patent Title: Deposition mask, method of manufacturing deposition mask and metal plate
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Application No.: US15763595Application Date: 2016-09-29
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Publication No.: US10538838B2Publication Date: 2020-01-21
- Inventor: Chikao Ikenaga , Yo Shimazaki , Kentarou Seki , Hiroki Furushou , Chiaki Hatsuta
- Applicant: Dai Nippon Printing Co., Ltd.
- Applicant Address: JP Shinjuku-Ku
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Shinjuku-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2015-194295 20150930; JP2015-194316 20150930; JP2016-138883 20160713; JP2016-139523 20160714
- International Application: PCT/JP2016/078899 WO 20160929
- International Announcement: WO2017/057621 WO 20170406
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/50 ; C25D1/08 ; C23F1/02 ; G03F7/00 ; H05B33/10 ; B23K26/073

Abstract:
A deposition mask includes a mask body and a through-hole provided in the mask body and through which a deposition material passes when the deposition material is deposited on a deposition target substrate. The mask body satisfies y≥950 and y≥23x−1280 when an indentation elastic modulus is x (GPa) and a 0.2% yield strength is y (MPa). When the mask body satisifies these inequalities, the generation of recesses during ultrasonic cleaning of the mask can be suppressed.
Public/Granted literature
- US20180334740A1 DEPOSITION MASK, METHOD OF MANUFACTURING DEPOSITION MASK AND METAL PLATE Public/Granted day:2018-11-22
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