- Patent Title: Method for film deposition and apparatus for performing said method
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Application No.: US15703016Application Date: 2017-09-13
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Publication No.: US10538840B2Publication Date: 2020-01-21
- Inventor: Alexander Usoskin , Thomas Schneider
- Applicant: Bruker HTS GmbH
- Applicant Address: DE Hanau
- Assignee: BRUKER HTS GMBH
- Current Assignee: BRUKER HTS GMBH
- Current Assignee Address: DE Hanau
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: EP16188465 20160913
- Main IPC: C23C14/22
- IPC: C23C14/22 ; C23C14/28 ; C23C14/54 ; C23C14/56

Abstract:
A method for depositing film on a substrate (16) through pulsed laser deposition, which includes: generating at least two pulsed laser beams (4, 5, 6) with at least one laser (1), and directing the at least two laser beams (4, 5, 6) to different target spots (9, 10, 11) of a target (12), whereby the target (12) is ablated and at least two plasma plumes (13) are created. The plasma plumes (13) create a flow of target material towards the substrate (16) and the target material is deposited onto the substrate (16) at a deposition area (24). The plasma plumes (13) created by the at least two laser beams (4, 5, 6) are spatially and temporally superimposed, and the target spots (9, 10, 11) are separated from each other at a distance that allows a gas-dynamical interaction of the created plasma plumes (13).
Public/Granted literature
- US20180073126A1 Method For Film Deposition and Apparatus for Performing Said Method Public/Granted day:2018-03-15
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