Invention Grant
- Patent Title: Devices and methods for electrochemical liquid phase epitaxy
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Application No.: US15865432Application Date: 2018-01-09
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Publication No.: US10538860B2Publication Date: 2020-01-21
- Inventor: Stephen Maldonado , Joshua DeMuth , Eli Fahrenkrug
- Applicant: The Regents of The University of Michigan
- Applicant Address: US MI Ann Arbot
- Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee Address: US MI Ann Arbot
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: C30B19/12
- IPC: C30B19/12 ; H01L21/28 ; H01M4/36 ; H01L21/02 ; C30B19/06 ; C30B19/10 ; C30B29/04 ; C30B29/06 ; C30B29/08 ; C30B30/02 ; H01M10/02 ; H01M8/06

Abstract:
Electrochemical liquid phase epitaxy (ec-LPE) processes and devices are provided that can form precipitated epitaxial crystalline films or layers on a substrate. The precipitated films may comprise a semiconductor, such as germanium, silicon, or carbon. Dissolution into, saturation within, and precipitation of the semiconductor from a liquid metal electrode (e.g., Hg pool) near an interface region with a substrate yields a polycrystalline semiconductor material deposited as an epitaxial film. Reactor cells for use in an electrochemical liquid phase epitaxy (ec-LPE) device are also provided that include porous membranes to facilitate formation of the precipitated epitaxial crystalline films.
Public/Granted literature
- US20180195203A1 DEVICES AND METHODS FOR ELECTROCHEMICAL LIQUID PHASE EPITAXY Public/Granted day:2018-07-12
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