Invention Grant
- Patent Title: Block-to-block reticle inspection
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Application No.: US15707791Application Date: 2017-09-18
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Publication No.: US10539512B2Publication Date: 2020-01-21
- Inventor: Abdurrahman Sezginer , Patrick LoPresti , Joe Blecher , Rui-fang Shi , Yalin Xiong , John Fielden
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G06K9/62
- IPC: G06K9/62 ; G01N21/88 ; G01N21/958 ; G06T7/00

Abstract:
Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.
Public/Granted literature
- US20180003647A1 Block-to-Block Reticle Inspection Public/Granted day:2018-01-04
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