Invention Grant
- Patent Title: Thin film bulk acoustic resonator with signal enhancement
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Application No.: US16285304Application Date: 2019-02-26
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Publication No.: US10539537B2Publication Date: 2020-01-21
- Inventor: Michael Salvati , Ian Robert Harmon
- Applicant: QORVO US, INC.
- Applicant Address: US NC Greensboro
- Assignee: QORVO US, INC.
- Current Assignee: QORVO US, INC.
- Current Assignee Address: US NC Greensboro
- Agency: Mueting, Raasch & Gebhardt, P.A.
- Main IPC: G01N29/02
- IPC: G01N29/02 ; G01N33/543 ; G01N29/036
Abstract:
Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.
Public/Granted literature
- US20190187098A1 THIN FILM BULK ACOUSTIC RESONATOR WITH SIGNAL ENHANCEMENT Public/Granted day:2019-06-20
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