Invention Grant
- Patent Title: Transfer unit and prober
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Application No.: US15952209Application Date: 2018-04-12
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Publication No.: US10539593B2Publication Date: 2020-01-21
- Inventor: Kentaro Sakai , Takekiyo Ichikawa
- Applicant: Tokyo Seimitsu Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Tokyo Seimitsu Co., Ltd.
- Current Assignee: Tokyo Seimitsu Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2016-036052 20160226
- Main IPC: G01R1/067
- IPC: G01R1/067 ; H01L21/677 ; G01R1/44 ; G01R31/28

Abstract:
The present invention provides a prober and a transfer unit being capable of improving throughput at each of the measurement units. The prober includes a transfer object housing that houses a plurality of transfer objects, the plurality of measurement units, the transfer unit that moves between the transfer object housing for housing the plurality of transfer objects and the plurality of measurement units to transfer the transfer objects into the transfer object housing or each of the measurement units, and a moving device. The transfer unit includes environment controller configured to control an environment in a casing, and air curtain formation means for causing the casing to be in a sealed or a substantially sealed state.
Public/Granted literature
- US10605829B2 Transfer unit and prober Public/Granted day:2020-03-31
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