Invention Grant
- Patent Title: Sensor device with a soft magnetic alloy having reduced coercivity, and method for making same
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Application No.: US15660337Application Date: 2017-07-26
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Publication No.: US10539632B2Publication Date: 2020-01-21
- Inventor: Jan-Willem Burssens , Robert Racz
- Applicant: Melexis Technologies SA
- Applicant Address: CH Bevaix
- Assignee: Melexis Technologies SA
- Current Assignee: Melexis Technologies SA
- Current Assignee Address: CH Bevaix
- Agency: Workman Nydegger
- Priority: EP16181344 20160726
- Main IPC: G01R33/07
- IPC: G01R33/07 ; G01R33/02 ; G01R33/09 ; H01F10/32 ; H01F41/14 ; H01L43/06

Abstract:
A sensor device comprising a substrate, the substrate comprising one or more magnetic sensor elements; a first elastomeric material on top of the one or more magnetic sensor elements; a magnetic layer comprising a soft magnetic metal alloy deposited by electroplating or by sputtering on top of the first elastomeric material; and optionally a second elastomeric material on top of the magnetic layer. The substrate may be a CMOS device with IMC encapsulated between two polyimide layers. The magnetic material may be annealed at 250° C. to 295° C. using a constant or rotating magnetic field having a strength in the range from 100 to 300 mTesla. The soft magnetic alloy is arranged as Integrated Magnetic Concentrator (IMC).
Public/Granted literature
- US20180031645A1 SENSOR DEVICE WITH A SOFT MAGNETIC ALLOY HAVING REDUCED COERCIVITY, AND METHOD FOR MAKING SAME Public/Granted day:2018-02-01
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