Invention Grant
- Patent Title: Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article
-
Application No.: US16390262Application Date: 2019-04-22
-
Publication No.: US10539879B2Publication Date: 2020-01-21
- Inventor: Takeshi Nakajima , Satoshi Tomura , Masato Hagiri , Mitsuru Seki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2018-085720 20180426
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03F7/20 ; G02B7/198 ; G03F7/26
Abstract:
An optical apparatus includes an optical component, a support mechanism configured to support the optical component, a manipulation mechanism configured to manipulate the optical component while contacting the optical component such that a state of the optical component is changed. The optical component is changed by the manipulation mechanism from a first state in which the optical component is supported by the support mechanism to a second state in which the optical component is supported by the manipulation mechanism.
Public/Granted literature
Information query
