- Patent Title: Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting abnormality
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Application No.: US14970715Application Date: 2015-12-16
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Publication No.: US10540559B2Publication Date: 2020-01-21
- Inventor: Chihiro Nagura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-256842 20141219
- Main IPC: G06T7/70
- IPC: G06T7/70 ; G06T7/00 ; G06K9/03 ; G01D5/347 ; G06K9/20 ; G06T7/20 ; G01D5/244

Abstract:
A position detection apparatus (100) which detects a position of an object includes a scale (2) including a periodic pattern, a detector (7) configured to be movable relative to the scale, and a signal processor (101) configured to acquire position information of the object based on a first output signal from the detector and perform abnormality determination based on a second output signal from the detector, a spatial frequency response of the first output signal is peaked at a first spatial frequency, and a spatial frequency response of the second output signal is peaked at a second spatial frequency different from the first spatial frequency.
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