Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US13363427Application Date: 2012-02-01
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Publication No.: US10541115B2Publication Date: 2020-01-21
- Inventor: Yusaku Sakka , Ryoji Nishio , Tadayoshi Kawaguchi
- Applicant: Yusaku Sakka , Ryoji Nishio , Tadayoshi Kawaguchi
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker Botts L.L.P.
- Priority: JP2011-220611 20111005
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
In a plasma processing apparatus that can adjust an induction magnetic field distribution of power feeding sections of an induction coil, correct a plasma distribution on a specimen, and apply uniform plasma processing to the specimen, the specimen is subjected to plasma processing, a dielectric window that forms the upper surface of the vacuum processing chamber, a gas lead-in section that leads gas into the vacuum processing chamber, a specimen table that is arranged in the vacuum processing chamber and on which the specimen is placed, an induction coil provided above the dielectric window, and a radio-frequency power supply that supplies radio-frequency power to the induction coil. The plasma processing apparatus includes a flat conductor arranged below the induction coil. The induction coil includes crossing power feeding sections. The conductor is arranged below the power feeding sections.
Public/Granted literature
- US20130087288A1 PLASMA PROCESSING APPARATUS Public/Granted day:2013-04-11
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