Invention Grant
- Patent Title: Systems and methods for tilting a wafer for achieving deposition uniformity
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Application No.: US14937174Application Date: 2015-11-10
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Publication No.: US10541117B2Publication Date: 2020-01-21
- Inventor: Shankar Swaminathan , Pramod Subramonium , Frank L. Pasquale , Jeongseok Ha , Chloe Baldasseroni
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: C23C16/458
- IPC: C23C16/458 ; H01L21/687 ; H01J37/32

Abstract:
Heights of carrier ring supports are increased at a side of a wafer that is located closer to a spindle of a plasma chamber. The heights are increased relative to a height of a carrier ring support that is located closer to side walls of the plasma chamber. The increase in the height results in an increase in thickness of a thin film deposited on the wafer to further achieve uniformity in thickness of the thin film across a top surface of the wafer.
Public/Granted literature
- US20170121819A1 Systems And Methods For Tilting A Wafer For Achieving Deposition Uniformity Public/Granted day:2017-05-04
Information query
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