- Patent Title: Three-dimensional memory devices and fabricating methods thereof
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Application No.: US16126425Application Date: 2018-09-10
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Publication No.: US10541249B2Publication Date: 2020-01-21
- Inventor: Ziqi Chen , Guanping Wu
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan, Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Wuhan, Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN201710772349 20170831
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11524 ; H01L27/11556 ; H01L27/11582 ; H01L21/768 ; H01L23/528 ; H01L23/522 ; H01L23/535 ; H01L21/28

Abstract:
A method for forming a 3D memory device is disclosed. The method includes: forming an alternating dielectric stack including multiple first dielectric layers and second dielectric layers on a substrate; forming a channel hole penetrating the alternating dielectric stack, a first diameter of a lower portion of the channel hole being smaller than a second diameter of an upper portion of the channel hole; forming a channel structure including a functional layer in the channel hole, the functional layer including a storage layer; forming an electrode plug in the upper portion of the channel hole; replacing the storage layer in the functional layer in the upper portion of the channel hole with a second insulating layer; and replacing the second dielectric layers in the alternating dielectric stack with conductive layers.
Public/Granted literature
- US20190123054A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATING METHODS THEREOF Public/Granted day:2019-04-25
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