Invention Grant
- Patent Title: Edge termination designs for silicon carbide super-junction power devices
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Application No.: US16060549Application Date: 2015-12-15
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Publication No.: US10541338B2Publication Date: 2020-01-21
- Inventor: Alexander Viktorovich Bolotnikov , Peter Almern Losee , David Alan Lilienfeld , James Jay McMahon
- Applicant: GENERAL ELECTRIC COMPANY
- Applicant Address: US NY Niskayuna
- Assignee: GENERAL ELECTRIC COMPANY
- Current Assignee: GENERAL ELECTRIC COMPANY
- Current Assignee Address: US NY Niskayuna
- Agency: Fletcher Yoder, P.C.
- International Application: PCT/US2015/065881 WO 20151215
- International Announcement: WO2017/105414 WO 20170622
- Main IPC: H01L29/872
- IPC: H01L29/872 ; H01L29/66 ; H01L29/36 ; H01L29/16 ; H01L29/06 ; H01L29/167

Abstract:
The subject matter disclosed herein relates to silicon carbide (SiC) power devices and, more specifically, to SiC super-junction (SJ) power devices. A SiC-SJ device includes a plurality of SiC semiconductor layers of a first conductivity-type, wherein a first and a second SiC semiconductor layer of the plurality of SiC semiconductor layers comprise a termination region disposed adjacent to an active region with an interface formed therebetween, an act wherein the termination region of the first and the second SiC semiconductor layers comprises a plurality of implanted regions of a second conductivity-type, and wherein an effective doping profile of the termination region of the first SiC semiconductor layer is different from an effective doping profile of the termination region of the second SiC semiconductor layer.
Public/Granted literature
- US20190006529A1 EDGE TERMINATION DESIGNS FOR SILICON CARBIDE SUPER-JUNCTION POWER DEVICES Public/Granted day:2019-01-03
Information query
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