Invention Grant
- Patent Title: Piezoelectric thin film element
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Application No.: US16085378Application Date: 2017-03-14
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Publication No.: US10541360B2Publication Date: 2020-01-21
- Inventor: Peter Mardilovich , Song-Won Ko , Susan Trolier-McKinstry , Trent Borman
- Applicant: Xaar Technology Limited
- Applicant Address: GB Cambridge
- Assignee: Xaar Technology Limited
- Current Assignee: Xaar Technology Limited
- Current Assignee Address: GB Cambridge
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Priority: EP16160658 20160316; GB1604457.0 20160316
- International Application: PCT/GB2017/050696 WO 20170314
- International Announcement: WO2017/158345 WO 20170921
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/318 ; H01L41/08 ; H01L41/187 ; B41J2/16 ; H01L41/047 ; H01L41/29

Abstract:
A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZrxTi1-xO3 where 0
Public/Granted literature
- US20190074428A1 A PIEZOELECTRIC THIN FILM ELEMENT Public/Granted day:2019-03-07
Information query
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