Displacement device
Abstract:
A displacement device including a stage and a stator, wherein the stator is shaped to provide a working region and the stator includes: a plurality of magnet blocks of the first kind, each magnet block of the first kind including a plurality of first magnets generally linearly elongated in the X-direction, and a plurality of magnet blocks of the second kind, each magnet block of the second kind including a plurality of second magnets generally linearly elongated in the Y-direction. The stage is movably arranged next to the stator in the Z-direction, and the stage includes: a coil block of the first kind, each coil block of the first kind including a plurality of electric conductors generally linearly elongated in the X-direction; and a coil block of the second kind, each coil block of the second kind including a plurality of electric conductors generally linearly elongated in the Y-direction.
Public/Granted literature
Information query
Patent Agency Ranking
0/0