Invention Grant
- Patent Title: Polishing apparatuses and polishing methods
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Application No.: US16375685Application Date: 2019-04-04
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Publication No.: US10543579B2Publication Date: 2020-01-28
- Inventor: Jian Zhou , Hongqi Li , James A. Cultra
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/04 ; B24B37/10 ; B24B49/10 ; B24B57/02 ; G01N21/31 ; H01L21/306 ; H01L21/66

Abstract:
Some embodiments include an apparatus having a polishing mechanism configured to polish a surface of a wafer. The polishing mechanism converts fresh slurry to used slurry during a polishing process. At least one emitter is configured to direct electromagnetic radiation onto or through the used slurry. At least one detector is configured to detect transmittance of the electromagnetic radiation through the used slurry or reflection of the electromagnetic radiation from the used slurry. An identification system is coupled with the at least one detector and is configured to identify a property of the used slurry indicating that an endpoint of the polishing process has been reached. Control circuitry is coupled with the identification system and is configured to stop the polishing process based on receiving a trigger from the identification system. Some embodiments include polishing methods.
Public/Granted literature
- US20190232457A1 Polishing Apparatuses and Polishing Methods Public/Granted day:2019-08-01
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