Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16113542Application Date: 2018-08-27
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Publication No.: US10546950B2Publication Date: 2020-01-28
- Inventor: Yusuke Kobayashi , Shinsuke Harada
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Priority: JP2017-195480 20171005
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L29/78 ; H01L21/02 ; H01L21/04 ; H01L29/06 ; H01L29/08 ; H01L29/10 ; H01L29/16 ; H01L29/423 ; H01L29/49 ; H01L29/66

Abstract:
At bottom of a gate trench, a conductive layer is provided. A Schottky junction is formed along a side wall of the gate trench by the conductive layer and the n-type current spreading region. The Schottky junction constitutes one unit cell of a trench-type SBD. In the gate trench, a gate electrode is provided on the conductive layer, via an insulating layer. The gate electrode constitutes one unit cell of a trench-gate-type vertical MOSFET. In other words, one unit cell of the trench gate MOSFET and one unit cell of the trench-type SBD are disposed built into a single gate trench and oppose each other in a depth direction.
Public/Granted literature
- US20190109227A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-04-11
Information query
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