Invention Grant
- Patent Title: Variable resistance memory devices and methods of manufacturing the same
-
Application No.: US15346751Application Date: 2016-11-09
-
Publication No.: US10546999B2Publication Date: 2020-01-28
- Inventor: Masayuki Terai , Dae-Hwan Kang , Gwan-Hyeob Koh
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2016-0018304 20160217
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A variable resistance memory device and a method of manufacturing the same, the device including first conductive lines disposed in a first direction on a substrate, each of the first conductive lines extending in a second direction crossing the first direction, and the first and second directions being parallel to a top surface of the substrate; second conductive lines disposed in the second direction over the first conductive lines, each of the second conductive lines extending in the first direction; a memory unit between the first and second conductive lines, the memory unit being in each area overlapping the first and second conductive lines in a third direction substantially perpendicular to the top surface of the substrate, and the memory unit including a variable resistance pattern; and an insulation layer structure between the first and second conductive lines, the insulation layer structure covering the memory unit and including an air gap in at least a portion of an area overlapping neither the first conductive lines nor the second conductive lines in the third direction.
Public/Granted literature
- US20170237000A1 VARIABLE RESISTANCE MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2017-08-17
Information query
IPC分类: