Laser-assisted micromachining systems and methods
Abstract:
Laser-assisted micromachining methods and systems capable of providing flexible beam positioning and low incident angles. Such laser-assisted micromachining systems preferably include a laser beam source, a cutting tool, means for engaging a workpiece with the cutting tool, optical elements arranged to define a path of a laser beam emitted by the laser beam source wherein the optical elements include at least a first mirror mounted in fixed relation to the laser beam source, and means for adjustably mounting a second mirror to project the laser beam onto the workpiece in proximity to the cutting tool and at an incidence angle relative to a surface of the workpiece.
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