Invention Grant
- Patent Title: Package substrate cutting jig table
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Application No.: US15797767Application Date: 2017-10-30
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Publication No.: US10549452B2Publication Date: 2020-02-04
- Inventor: Tomohiro Kaneko , Norihisa Arifuku
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2016-220827 20161111
- Main IPC: B23Q3/00
- IPC: B23Q3/00 ; B28D7/04 ; B25B11/00 ; H01L21/67

Abstract:
A package substrate cutting jig table for use in cutting a package substrate is provided. The jig table includes a jig base and a holding member adapted to be detachably mounted on the jig base. The holding member includes a holding surface for holding the package substrate, a plurality of escape grooves formed on the holding surface for preventing the interference of a cutting blade with the holding member, the escape grooves corresponding to a plurality of division lines formed on the package substrate, and a plurality of suction holes formed in a plurality of separate regions defined by the escape grooves on the holding surface. The holding member is formed of a material having a dynamic viscoelastic modulus ranging from 0.16 to 0.41.
Public/Granted literature
- US20180133930A1 PACKAGE SUBSTRATE CUTTING JIG TABLE Public/Granted day:2018-05-17
Information query
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