- Patent Title: Methods and apparati for handling, heating and cooling a substrate upon which a pattern is made by a tool in heat flowable material coating, including substrate transport, tool laydown, tool tensioning and tool retraction
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Application No.: US14345681Application Date: 2012-09-22
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Publication No.: US10549476B2Publication Date: 2020-02-04
- Inventor: Emanuel M. Sachs , Peter E. Kane , Holly G. Gates , Damian W. Harris , Benjamin F. Polito , Hector A. Inirio
- Applicant: 1366 TECHNOLOGIES, INC.
- Applicant Address: US MA Bedford
- Assignee: 1366 TECHNOLOGIES, INC.
- Current Assignee: 1366 TECHNOLOGIES, INC.
- Current Assignee Address: US MA Bedford
- Agency: The Marbury Law Group, PLLC
- International Application: PCT/US2012/056770 WO 20120922
- International Announcement: WO2013/044181 WO 20130328
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C59/02
Abstract:
A workpiece is transported using a porous belt, which belt delivers a workpiece to a chuck, upon which the workpiece is held by vacuum. The belt can be porous PTFE. A flexible stamp is preheated, before it is applied to a workpiece, by drawing the stamp toward a heated plate, for instance by vacuum.
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