Liquid discharge head and liquid discharge apparatus including the same
Abstract:
A liquid discharge head is provided. The liquid discharge head includes: a semiconductor substrate including a first pressure chamber; an insulating film disposed above the semiconductor substrate; a first piezoelectric element disposed on an opposite side to the first pressure chamber of the insulating film and having a piezoelectric layer and a first and second electrode; and a doped layer formed in the semiconductor substrate. The doped layer partitions at least part of the first pressure chamber and has a lower electrical resistivity than the insulating film and the semiconductor substrate. A through hole having a conductor disposed on its inside is formed in the insulating film, and the first electrode and the doped layer are electrically continuous via the conductor.
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