- Patent Title: Method for treatment of hexachlorodisilane and hydrolyzed product
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Application No.: US15987229Application Date: 2018-05-23
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Publication No.: US10550002B2Publication Date: 2020-02-04
- Inventor: Jenq-Renn Chen , Hsiao-Yun Tsai , Yu-Jhen Lin , Chien-Ho Liu , Mo-Geng Chin , Cheng-Chieh Wang , Eugene Yin Ngai
- Applicant: NATIONAL KAOHSIUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: TW Kaohsiung
- Assignee: National Kaohsiung University of Science and Technology
- Current Assignee: National Kaohsiung University of Science and Technology
- Current Assignee Address: TW Kaohsiung
- Agency: Rosenberg, Klein & Lee
- Main IPC: C01B33/107
- IPC: C01B33/107
Abstract:
A method for treatment of a hexachlorodisilane and its hydrolyzed product is disclosed. It comprises adding a hexachlorodisilane or its hydrolyzed product into a sulfuric acid solution for reaction.
Public/Granted literature
- US20190359490A1 METHOD FOR TREATMENT OF HEXACHLORODISILANE AND HYDROLYZED PRODUCT Public/Granted day:2019-11-28
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