Invention Grant
- Patent Title: Film for temporary fixing, film sheet for temporary fixing and semiconductor device
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Application No.: US15107985Application Date: 2014-12-24
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Publication No.: US10550295B2Publication Date: 2020-02-04
- Inventor: Takahiro Tokuyasu , Masanori Natsukawa , Yasuyuki Ooyama
- Applicant: HITACHI CHEMICAL COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery, LLP
- Priority: JP2013-268906 20131226
- International Application: PCT/JP2014/084120 WO 20141224
- International Announcement: WO2015/098949 WO 20150702
- Main IPC: C09J133/00
- IPC: C09J133/00 ; C09J7/20 ; C09J7/00 ; C09J133/06 ; C09J167/04 ; C09J183/04 ; C09J143/04 ; C08L83/04 ; C08L67/04 ; C08L43/04 ; C08L33/06 ; C08G77/445 ; H01L21/78 ; H01L21/683 ; H01L25/065

Abstract:
The film for temporary fixing of the present invention is a film for temporary fixing which is used in a processing method of a semiconductor wafer, the method including a temporary fixing step of temporarily fixing the semiconductor wafer to a support via the film for temporary fixing, a processing step of processing the semiconductor wafer that is temporarily fixed to the support, and a separation step of separating the processed semiconductor wafer from the support and the film for temporary fixing, contains (A) a high molecular weight component and (B) a silicone-modified resin, and has a modulus of elasticity of from 0.1 to 1000 MPa at 23° C. after being heated for 30 minutes at 110° C. and for 1 hour at 170° C.
Public/Granted literature
- US20160326409A1 FILM FOR TEMPORARY FIXING, FILM SHEET FOR TEMPORARY FIXING AND SEMICONDUCTOR DEVICE Public/Granted day:2016-11-10
Information query
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