Invention Grant
- Patent Title: Ion trajectory manipulation architecture in an ion pump
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Application No.: US15259424Application Date: 2016-09-08
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Publication No.: US10550829B2Publication Date: 2020-02-04
- Inventor: Anthony Wynohrad , Joel Langeberg
- Applicant: Edwards Vacuum LLC
- Applicant Address: US NY Sanborn
- Assignee: Edwards Vacuum LLC
- Current Assignee: Edwards Vacuum LLC
- Current Assignee Address: US NY Sanborn
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Main IPC: F04B37/04
- IPC: F04B37/04 ; F04B37/14 ; F04B19/00 ; H01J41/12
Abstract:
An ion pump includes an anode, a backing surface having at least one surface structure extending toward the anode and a cathode positioned between the anode and the backing surface and having an opening such that the at least one surface structure is aligned with and extends from the backing surface towards the opening.
Public/Granted literature
- US20180068836A1 ION TRAJECTORY MANIPULATION ARCHITECTURE IN AN ION PUMP Public/Granted day:2018-03-08
Information query
