Invention Grant
- Patent Title: Cryopump
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Application No.: US15399488Application Date: 2017-01-05
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Publication No.: US10550830B2Publication Date: 2020-02-04
- Inventor: Kakeru Takahashi
- Applicant: Sumitomo Heavy Industries, Ltd.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2016-002490 20160108
- Main IPC: F04B37/08
- IPC: F04B37/08 ; B01D8/00

Abstract:
A cryopump includes a second cryopanel unit which is thermally connected to a second cooling stage of a cryocooler, a radiation shield which includes a shield main opening, a shield side opening, and a shield bottom opening, and a cryopump housing having a housing bottom portion which faces the shield bottom opening. A dimension of the shield bottom opening is larger than a distance from the second cryopanel unit to the housing bottom portion.
Public/Granted literature
- US20170198684A1 CRYOPUMP Public/Granted day:2017-07-13
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