Invention Grant
- Patent Title: MEMS device with improved spring system
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Application No.: US15866140Application Date: 2018-01-09
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Publication No.: US10551193B2Publication Date: 2020-02-04
- Inventor: Joseph Seeger , Ozan Anac
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01C19/5755
- IPC: G01C19/5755 ; G01C19/5733

Abstract:
A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.
Public/Granted literature
- US20180128615A1 MEMS DEVICE WITH IMPROVED SPRING SYSTEM Public/Granted day:2018-05-10
Information query
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