Invention Grant
- Patent Title: Gas sensor
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Application No.: US16059278Application Date: 2018-08-09
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Publication No.: US10551314B2Publication Date: 2020-02-04
- Inventor: Edson Gomes Camargo , Satoshi Takehara
- Applicant: ASAHI KASEI MICRODEVICES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2013-202031 20130927; JP2014-014700 20140129
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/61 ; G01N21/3504 ; G01N21/03 ; H01L31/0304 ; H01L31/167

Abstract:
A small-size reliable gas sensor that can reduce a measurement error can be provided. The gas sensor includes a first light source; a first sensor unit and a second sensor unit disposed to receive light output from the first light source; a first substrate having a first principal surface on which the first light source and the first sensor unit are provided; and a second substrate having a first principal surface on which the second sensor unit is provided. The first sensor unit is disposed at a location where light output from the first light source and reflected on the second principal surface strikes the first principal surface of the first substrate.
Public/Granted literature
- US20190072489A1 GAS SENSOR Public/Granted day:2019-03-07
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