A Mach-Zehnder modulator includes an optical waveguide, first and second arm waveguides, an embedded area, an conductive semiconductor layer, first and second signal upper layers extending over the embedded area and connected to the first and second arm waveguides, a first ground upper layer extending over the embedded area along at least one of the first and the second signal upper layers, a ground lower layer connected to the first ground upper layer and extending through the embedded area along the and second first signal upper layers, and a first conductive upper layer connected to the ground lower layer and extending over the embedded area along at least one of the first and second signal upper layers. The ground lower layer extends between the optical waveguide, the first signal upper layer, and the second signal upper layer.