Invention Grant
- Patent Title: Method for aligning chip components relative to substrate by using liquid
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Application No.: US16085205Application Date: 2017-03-03
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Publication No.: US10553455B2Publication Date: 2020-02-04
- Inventor: Shinya Kikuta , Satohiko Hoshino , Takafumi Fukushima , Mitsumasa Koyanagi , Kangwook Lee
- Applicant: TOKYO ELECTRON LIMITED , TOHOKU UNIVERSITY
- Applicant Address: JP Tokyo JP Sendai-Shi, Miyagi
- Assignee: TOKYO ELECTRON LIMITED,TOHOKU UNIVERSITY
- Current Assignee: TOKYO ELECTRON LIMITED,TOHOKU UNIVERSITY
- Current Assignee Address: JP Tokyo JP Sendai-Shi, Miyagi
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2016-053712 20160317
- International Application: PCT/JP2017/008482 WO 20170303
- International Announcement: WO2017/159401 WO 20170921
- Main IPC: H01L21/52
- IPC: H01L21/52 ; H01L21/68

Abstract:
A liquid is supplied to a substrate and a chip component is arranged on the liquid. The substrate includes a first surface in which a rectangular mounting region is formed. The chip component includes a second surface having a rectangular shape which substantially coincides with the shape of the mounting region, and has an area substantially equal to that of the mounting region. The mounting region includes first and second regions. Wettability of the first region with respect to the liquid is higher than that of the second region with respect to the liquid. The first region is provided symmetrically with respect to a first central line passing through the middle of a pair of long sides and a second central line passing through the middle of a pair of short sides in the mounting region, and includes rectangular partial regions. The liquid is supplied to the first region.
Public/Granted literature
- US20190096697A1 METHOD FOR ALIGNING CHIP COMPONENTS RELATIVE TO SUBSTRATE BY USING LIQUID Public/Granted day:2019-03-28
Information query
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