Invention Grant
- Patent Title: Semiconductor wafer carriers
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Application No.: US16030181Application Date: 2018-07-09
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Publication No.: US10553466B2Publication Date: 2020-02-04
- Inventor: Emmanuel Chua Abas , Carl Anthony Pangan Pondoyo , Emil Alcaraz Pares , Arnold Villamor Castillo , Vergil Rodriguez Sandoval
- Applicant: SunPower Corporation
- Applicant Address: US CA San Jose
- Assignee: SUNPOWER CORPORATION
- Current Assignee: SUNPOWER CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
This specification describes semiconductor wafer carriers, methods for manufacturing the semiconductor wafer carriers, and methods for using the semiconductor wafer carriers. The semiconductor wafer carriers can include features for avoiding double-slotting, for preventing glove marks on semiconductor wafers, and for providing additional sitting and storage options for the wafer carrier. In some examples, a semiconductor wafer carrier includes multiple notched left-side rods that are parallel in a vertical direction and multiple notched right-side rods that are parallel in the vertical direction. The semiconductor wafer carrier includes one or more bottom rods. The left-side rods, the right-side rods, and the one or more bottom rods are joined to define semiconductor wafer slots.
Public/Granted literature
- US20180337080A1 SEMICONDUCTOR WAFER CARRIERS Public/Granted day:2018-11-22
Information query
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