Invention Grant
- Patent Title: Manufacturing method of array substrate, array substrate and display apparatus
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Application No.: US15762292Application Date: 2017-09-08
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Publication No.: US10553624B2Publication Date: 2020-02-04
- Inventor: Kui Gong , Xianxue Duan
- Applicant: BOE Technology Group Co., Ltd. , Hefei BOE Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing CN Hefei
- Assignee: BOE Technology Group Co., Ltd.,Hefei BOE Optoelectronics Technology Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.,Hefei BOE Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing CN Hefei
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201710090921 20170220
- International Application: PCT/CN2017/101051 WO 20170908
- International Announcement: WO2018/149119 WO 20180823
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/027 ; H01L21/321 ; H01L21/768 ; H01L29/16 ; H01L29/66 ; H01L29/786 ; G02F1/1362 ; G02F1/1368

Abstract:
A manufacturing method of an array substrate, an array substrate and a display apparatus are provided. The manufacturing method includes: providing a base substrate; sequentially forming an active layer and a first insulating layer that covers the active layer on the base substrate; performing one patterning process on the first insulating layer, so as to form a first through hole and a second through hole that expose the active layer in the first insulating layer, and form a first recess at a surface of the first insulating layer; forming a conductive layer on the patterned first insulating layer, with the conductive layer being filled in the first through hole, the second through hole and the first recess; conducting a grinding process to form a source electrode, a drain electrode and a pixel electrode are formed respectively.
Public/Granted literature
- US20190074305A1 Manufacturing Method of Array Substrate, Array Substrate and Display Apparatus Public/Granted day:2019-03-07
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