Invention Grant
- Patent Title: Method of fabricating an acoustic transducer
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Application No.: US15539103Application Date: 2014-12-23
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Publication No.: US10553779B2Publication Date: 2020-02-04
- Inventor: Tomasz Zawada , Ruichao Xu , Michele Guizzetti , Louise Møller Borregaard , Erling Ringgaard
- Applicant: MEGGIT A/S
- Applicant Address: DK Kvistgaard
- Assignee: MEGGITT A/S
- Current Assignee: MEGGITT A/S
- Current Assignee Address: DK Kvistgaard
- Agency: Hackler Daghighian Martino & Novak
- International Application: PCT/EP2014/079183 WO 20141223
- International Announcement: WO2016/102006 WO 20160630
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/29 ; B06B1/06 ; H01L41/187

Abstract:
A method of fabricating an acoustic transducer comprising: fabricating a substrate; depositing a bottom electrode on the substrate; depositing an active layer on the bottom electrode; depositing a top electrode on the active layer; wherein at least one electrode is patterned to form at least two active elements; and, wherein a ratio of a thickness coupling coefficient kt to an effective lateral coupling coefficient k31,eff of the active layer is 1.3 or greater.
Public/Granted literature
- US20180226566A1 INTEGRATED MULTI-ELEMENT ACOUSTIC TRANSDUCERS AND METHODS OF MAKING THE SAME Public/Granted day:2018-08-09
Information query
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