Invention Grant
- Patent Title: Magnetoresistive random access memory device and method of making same
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Application No.: US13452230Application Date: 2012-04-20
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Publication No.: US10553785B2Publication Date: 2020-02-04
- Inventor: Chern-Yow Hsu , Shih-Chang Liu , Chia-Shiung Tsai
- Applicant: Chern-Yow Hsu , Shih-Chang Liu , Chia-Shiung Tsai
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/12 ; G11C11/16

Abstract:
This description relates to a method for fabricating a magnetoresistive random access memory (MRAM) device having a plurality of magnetic tunnel junction (MTJ) units. The method includes forming a bottom conductive layer, forming an anti-ferromagnetic layer and forming a tunnel layer over the bottom conductive layer and the anti-ferromagnetic layer. The method further includes forming a free magnetic layer, having a magnetic moment aligned in a direction that is adjustable by applying an electromagnetic field, over the tunnel layer and forming a top conductive layer over the free magnetic layer. The method further includes performing at least one lithographic process to remove portions of the bottom conductive layer, the anti-ferromagnetic layer, the tunnel layer, the free magnetic layer and the top conductive layer that is uncovered by the photoresist layer until the bottom conductive layer is exposed and removing portions of at least one sidewall of the MTJ unit.
Public/Granted literature
- US20130277778A1 MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICE AND METHOD OF MAKING SAME Public/Granted day:2013-10-24
Information query
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