Invention Grant
- Patent Title: Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate
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Application No.: US14917414Application Date: 2014-09-04
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Publication No.: US10557200B2Publication Date: 2020-02-11
- Inventor: Taro Ikeda , Shigeru Kasai , Emiko Hara , Yutaka Fujino , Yuki Osada , Jun Nakagomi , Tomohito Komatsu
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2013-188665 20130911; JP2014-118531 20140609
- International Application: PCT/JP2014/073311 WO 20140904
- International Announcement: WO2015/037508 WO 20150319
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32 ; C23C16/511 ; B05B1/00 ; B05B1/14

Abstract:
A plasma processing device processes a substrate by generating plasma using a surface wave formed on a surface of a shower plate by a supplied microwave, which includes a plasma generating antenna equipped with the shower plate for supplying first and second gases into a processing vessel, and a drooping member installed to protrude downward from a lower end surface of the shower plate. An outer surface of the drooping member spreads outward as it goes from a top end to a bottom end thereof. The shower plate includes first and second gas supply holes through which the first and second gases are supplied into the processing vessel, respectively. The first gas supply holes are disposed inward of the outer surface of the drooping member. The second gas supply holes are disposed outward of the outer surface of the drooping member.
Public/Granted literature
- US20160222516A1 PLASMA PROCESSING DEVICE Public/Granted day:2016-08-04
Information query
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