Noncontact fluid bearing and manufacturing method thereof
Abstract:
A noncontact fluid bearing is manufactured by disposing a flow controller in a cavity of a carrier to form a pressure chamber within the cavity. A sealing layer of the flow controller is located between a porous layer of the flow controller and the pressure chamber and has micro through holes communicating with the pressure chamber and pores of the porous layer. Because the sealing layer is located in the pressure chamber and a surface of the porous layer is exposed by a housing of the carrier, the noncontact fluid bearing can be processed from the exposed surface of the porous layer to conform standards of thickness and flatness. Furthermore, the sealing layer peeling from the noncontact fluid bearing is prevented.
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