Invention Grant
- Patent Title: Method of inspecting electrode provided in gas sensor element
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Application No.: US15996560Application Date: 2018-06-04
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Publication No.: US10557817B2Publication Date: 2020-02-11
- Inventor: Taku Okamoto , Yuki Nakayama , Soichiro Yoshida
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Mattingly & Malur, PC
- Priority: JP2017-115093 20170612
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01N27/416 ; H01L21/66 ; G01N27/04 ; G01D5/06 ; G01D5/241 ; G01D11/24 ; G01D5/165 ; G01N27/406 ; G01N27/407

Abstract:
A method of inspecting an electrode provided in a gas sensor element includes the steps of: producing, in advance, a calibration curve representing a relation between an Au maldistribution degree defined based on a ratio of an area of a portion at which Au is exposed on a noble metal particle surface and calculated from a result of XPS or AES analysis on an inspection target electrode, and a predetermined alternative maldistribution degree index correlated with the Au maldistribution degree and acquired in a non-destructive manner from the gas sensor element heated to a predetermined temperature; acquiring a value of the alternative maldistribution degree index for the inspection target electrode of the gas sensor element while the gas sensor element is heated to the predetermined temperature; and determining whether the Au maldistribution degree satisfies a predetermined standard based on the calibration curve and the acquired inspection value.
Public/Granted literature
- US20180356364A1 METHOD OF INSPECTING ELECTRODE PROVIDED IN GAS SENSOR ELEMENT Public/Granted day:2018-12-13
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