Invention Grant
- Patent Title: Control device, lithography apparatus, and method of manufacturing article
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Application No.: US16394154Application Date: 2019-04-25
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Publication No.: US10558128B2Publication Date: 2020-02-11
- Inventor: Koji Yoshida , Junichi Motojima , Mitsuhide Nishimura , Yoshihiro Omameuda
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2018-088405 20180501
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The present invention provides a control device that performs position control of a control target by giving a feedforward manipulated value to the control target, wherein the device obtains, for each of a plurality of positions at which the control target is to be arranged, a measurement result of a first output response of the control target obtained when giving a first manipulated value to the control target, determines a reference value of the first output response, based on the measurement results respectively obtained at the plurality of positions, determines a second manipulated value by arraying a plurality of first manipulated values in time-series based on a relationship between the first manipulated value and the reference value, and sets the feedforward manipulated value based on the second manipulated value.
Public/Granted literature
- US20190339624A1 CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2019-11-07
Information query
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