Invention Grant
- Patent Title: Non-transitory computer-readable storage medium storing a program of screen control and semiconductor manufacturing apparatus
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Application No.: US16051222Application Date: 2018-07-31
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Publication No.: US10559277B2Publication Date: 2020-02-11
- Inventor: Tsuneo Torikoshi , Takamasa Nakamura
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker Hostetler LLP
- Priority: JP2017-151765 20170804
- Main IPC: G09G5/00
- IPC: G09G5/00 ; G06F3/0482 ; G05B19/042 ; H01L21/67 ; G06F1/16 ; G06F3/0488

Abstract:
A non-transitory computer-readable storage medium storing a program of screen control capable of improving the user-friendliness with respect to a semiconductor manufacturing apparatus is disclosed. The program of screen control causes a computer to perform operation of: judging whether or not a vertical screen resolution of a display screen is larger than a horizontal screen resolution of the display screen; and dividing a display area of the display screen into a main screen display area for displaying a monitoring image with respect to an operational status of a processing unit and a work area for displaying an operation image with respect to an operation of the processing unit when the vertical screen resolution is larger than the horizontal screen resolution.
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