Invention Grant
- Patent Title: Electronic device and method for fabricating the same using treatment with nitrogen and hydrogen
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Application No.: US15482548Application Date: 2017-04-07
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Publication No.: US10559422B2Publication Date: 2020-02-11
- Inventor: Ga-Young Ha , Ki-Seon Park , Jong-Han Shin , Jeong-Myeong Kim , Bo-Kyung Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Perkins Coie LLP
- Priority: KR10-2016-0139988 20161026
- Main IPC: H01F41/30
- IPC: H01F41/30 ; H01F10/32 ; H01F41/32 ; H01L43/08 ; H01L43/12 ; G01R33/09 ; G11B5/39

Abstract:
A method for fabricating an electronic device including a semiconductor memory includes: forming a variable resistance element over a substrate, the variable resistance element including a metal-containing layer and an MTJ (Magnetic Tunnel Junction) structure which is located over the metal-containing layer and includes a free layer having a variable magnetization direction, a pinned layer having a fixed magnetization direction and a tunnel barrier layer interposed between the free layer and the pinned layer; forming an initial spacer containing a metal over the variable resistance element; performing an oxidation process to transform the initial spacer into a middle spacer including an insulating metal oxide; and performing a treatment using a gas or plasma including nitrogen and hydrogen to transform the middle spacer produced by the oxidation process into a final spacer including an insulating metal nitride or an insulating metal oxynitride.
Public/Granted literature
- US20180114639A1 ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2018-04-26
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